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Normally that's a wiring problem - check for bent pins in the harness or rubbing wires. Inspect underneath the wires too because it can hide a rub through spot.

Also check EGR function and the VNT. Even if it looks like it's moving you really do have to put a vacuum gauge on it and see the range of motion and at what vacuum it stops moving. The EGR can cause problems because if the intake air is displaced by the EGR gasses the MAF can get screwy. Most likely is a vacuum line problem.
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