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from another post, here are your vacuum line specs:

3,5 X 2 (part number N 020 353 5)
350 mm from main vacuum line to a T
80 mm from a T to the N18 (black top valve)
170 mm from a T to a small check valve
45 mm from a T to the N75 (white top valve)
530 mm from a T to the vacuum canister (damper)
1000 mm from turbo to a connecting pipe
60 mm from a T to a T
180 mm from a T to N239 (change over valve)
120 mm from N239 to vacuum actuator
5 X 3 (part number N 020 282 1)
360 mm from N18 to EGR valve
50 mm from N75 to connecting pipe (going to turbo)
320 mm from N75 to fresh air line T
80 mm from N18 to fresh air line T
300 mm from air box to fresh air line T
T pieces are part number 113 201 943 B
small vacuum check valve is 046 905 291 A
connecting pipe is 06A 133 382 K

PS, a faulty MAF can also set this code. The EGR reduces the intake air at the MAF by letting in exhaust. If it doesn't see the reduction in MAF, then it sets a code and knows that something is wrong. Check here: http://www.myturbodiesel.com/1000q_how_to/a4/maf.htm and here: http://www.myturbodiesel.com/1000q_how_to/multi/MAFfaq.htm

It could be a sticking egr solenoid too. The egr solenoid valve could be sticking but you just had the intake cleaned. Try taking it on the highway when fully warmed up and flooring it every once in a while, it won't blow out the build up on the intake side but it will help blow out the soot on th exhaust side.
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